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Spin Coater, Megasonic, Probe Card - Sistem Technology
In our WET PROCESSING product portfolio we offer MANUAL and SEMI-AUTOMATED WET BENCHES or FUME HOODS for ACID and SOLVENT Processing.
Our WET STATION ancillaries include DI WATER HEATERS, CHEMICAL HEATERS in QUARTZ, FLUOROPOLYMER, STAINLESS STEEL and TITANIUM.
We also offer CONSTANT TEMPERATURE PROCESS TANKS, QUICK DUMP RINSERS, SOLVENT and NITROGEN HEATERS, HEAT EXCHANGERS, TEMPERATURE RECIRCULATORS and RE-USABLE FILTER HOUSINGS.
For CHEMICAL SUPPLY to our wet benches, we offer BULK and LOCAL CHEMICAL DISPENSE SYSTEMS, CHEMICAL CARTS for DISPENSE and WASTE REMOVAL. Also CUSTOM MIX and BLEND SYSTEMS.
Our MEGASONIC cleaning technology products cover the widest range of applications, from single substrate small R & D processors, through high volume batch MEGASONIC TANK systems to state of the art, single wafer, RADIAL MEGASONIC spin processing.
In our THERMAL PROCESSING product range, we cover HORIZONTAL and VERTICAL FURNACE ELEMENTS, VESTIBULE BLOCKS and TORCH ELEMENTS for low, medium and high temperature applications both new and replacements for most common OEM furnace manufacturers. We also supply furnace QUARTZWARE and QUARTZ FABRICATIONS for most other high purity applications such as CASSETTES, PEDESTALS, TUBES and QUARTZ MACHINED PARTS.
For lower temperature thermal processing we have a comprehensive range of microprocessor-controlled CONVECTION or VACUUM OVENS for temperatures up to 450°C.
In our CMP product range we provide SLURRY MIX and DISPENSE SYSTEMS, and PAD CONDITIONERS.
For PROBE and TEST applications we have EPOXY and BLADE PROBE CARDS for FUNCTIONAL and PARAMETRIC TEST, DUT and INTERFACE BOARDS and BURN-IN BOARDS. PROBE NEEDLE CLEANING may be achieved with our range of advanced polymeric films for both off-line and on-line PROBE CLEANING or PROBE TIP RE-SHAPING.
We offer a wide range of repair and refurbishment services and SPARE PARTS to support a number of OEM product lines. These include AMAT, LAM, NOVELLUS, VEECO, FSI HELIOS, TEGAL, S &K, FORTREND and others on request.
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