Litmas RPS 1501 and 3001 Remote Plasma Sources The Litmas RPS is the only fully integrated, remote, inductive plasma source and power delivery system available in a high-conductance, low-surface-area geometry. It is well suited to wafer pre-clean, photoresist strip, ALD, exhaust gas abatement, and more. Litmas.com~Site InfoWhoisTrace RouteRBL Check